R&D for Semiconductor

DNF R&D center has been working on development of core materials for semiconductor to meet the needs of customer and industry since 2003. We have done several joint research and development projects with chip-makers, equipment companies, and university laboratories successfully. Those achievements and products by continuous and steady R&D efforts helped global semiconductor industry to develop, and it was the way we could make your life better.

DNF R&D Roadmap (Developed, Developing)

Wire	Alpis-3		MABOC (Ep-Cu Seed)		CVD/ALD Cu Precursor
Electrode	TiCl4 / TEMAT / TDMAT / Ru Precursor
High-k	TEMAHf / TEMAZr		Zr Precursor		STO/BST/Zr Precursor
Low-k				Low-k (CVD) Precursor
Gap-Fill	Polysilazane				Flowable Oxide Precursor
Diffusion Barrier	TiCl4	TDMATi / Ta Precursor			Ru Precursor
Etch Hardmask	SiN	1-Hexene/Propylene (ACL)		SOC Precursor
Low Temp. Silicon (DPT)			DIPAS		ALD SiO2
New Memory	Ge / Sb / Te / Fe / Co / Ni Precursor
Gate Metal	(CVD) Ni / Co / W Precursor				ALD Metal
TSV	ALD SiO2 / Ti Precursor / Ta Precursor / CVD Cu
	50nm	40nm	30nm	20nm	10nm~

* CVD : Chemical Vapor Deposition * ALD : Atomic Layer Deposition * Ep : Electroplating * SOC : Spin on Carbon
* ACL : Amorphous Carbon Layer * DPT : Double Patterning Technology * TSV : Through Silicon Via

R&D for Display

People are getting interested in smartphone and tablet PC, it will be much bigger when they are flexible. DNF R&D center is also interested in how to make the panel unbreakable or flexible and how to protect the OLED layer inside panel against oxygen and moisture.

R&D for Nano Tech.

We have much research and development experience in nano-based products like semiconductor precursors and display materials. From the experience we are working on other industry materials such as functional coatings, monodisperse nanoparticles, and rare metal catalyst. You will see our products inside building materials, home appliances, automobiles, etc., in a few years.