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High-k for Metal Gate

High-k dielectric materials is required for gate insulator of semiconductor device below 45nm because of increasing tunneling leakage current rapidly in thin insulator by scaling. HfO2 has been used for gate insulator by chipmakers such as Intel, they are studying Al, Zr, STO, BST, etc. as alternative of Hf source.

High-k for Metal Gate

Product Structure Property MSDS
TEMAHf Molecular Formula
Molecular Weight
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity
: C12H32N4Hf
: 411.89g/mol
: 25¡É/0.1torr
: -
: Yellow Liquid
: Violently react
TEMAZr Molecular Formula
Molecular Weight
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity
: C12H32N4Zr
: 323.62g/mol
: 81¡É/0.1torr
: -
: Liquid(Colorless to pale Yellow)
: Violently react
A2HP7 Molecular Formula
Molecular Weight
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity
: C11H23N3Zr
: 288.5g/mol
: 264¡É
: 90¡É/0.3torr
: Yellow Liquid
: Slowly react
TBTDETa Molecular Formula
Molecular Weight
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity
: C16H39N4Ta
: 468.45g/mol
: 95¡É/0.5torr
: 120¡É/1.0torr
: Pale Yellow Liquid
: Slowly react
(HMDS)Hf(Py)3 Molecular Formula
Molecular Weight
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity
: C18H42N4Si2Hf
: 549.21g/mol
: 142¡É/0.8torr
: 91¡É/0.1torr
: Yellow Liquid
: Slowly react
HTTB Molecular Formula
Molecular Weight
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity
: C16H36O4Hf
: 470.94g/mol
: 90¡É/5torr
: -
: Liquid(Colorless )
: Slowly react