Metallization Metal

Metal deposition process has been changed from PVD(Physical Vapor Deposition) to CVD(Chemical Vapor Deposition)/ALD(Atomic Layer Deposition) because of scaling down on semiconductor device. It makes metal precursors be changed either. Alpis-3 and MABOC are CVD/ALD metal precursors developed by DNF following roadmap.

* Metallization Metal Materials change : W(Resistivity 8.0 μΩ-cm) → Al(2.7 μΩ-cm) → Cu(1.7 μΩ-cm)
* Metal Deposition process change : PVD → CVD → ALD

Product	Structure	Property		MSDS
Alpis-3		Molecular Formula Molecular Weight Melting Point Boiling Point Vapor Pressure Physical State/Color Water Reactivity	: C3H15AlBN : 102.95g/mol : 19¡É : 195°C : 40¡É/1torr : Liquid (Colorless) : React Violently
DMEAA		Molecular Formula Molecular Weight Melting Point Boiling Point Vapor Pressure Physical State/Color Water Reactivity	: C4H14AlN : 103.14g/mol : 5¡É : 50°C/0.05torr : 24¡É/1.98torr : Liquid (Colorless) : React Violently
DMAH		Molecular Formula Molecular Weight Melting Point Boiling Point Vapor Pressure Physical State/Color Water Reactivity	: C2H7Al : 58.06g/mol : 15¡É : 154¡É : 25¡É/1.9torr : Liquid (Colorless) : React Violently
CCTBA		Molecular Formula Molecular Weight Boiling Point Vapor Pressure Physical State/Color Water Reactivity	: C12H10O6Co2 : 368.07g/mol : 52¡É/0.8torr : 40¡É/0.1torr : Liquid (Reddish brown) : No Reaction
BTBBDMT		Molecular Formula Molecular Weight Boiling Point Vapor Pressure Physical State/Color Water Reactivity	: C2H30N4W : 414.23g/mol : 60¡É/0.05torr : 40¡É/0.1torr : Liquid (Pale yellow) : React slowly
TMA		Molecular Formula Molecular Weight Melting Point Boiling Point Vapor Pressure Physical State/Color Water Reactivity	: C3H9Al : 72.09g/mol : 15°C : 125°C : 60¡É/69.3torr : Liquid (Colorless) : React Violently
MABOC		Molecular Formula Molecular Weight Boiling Point Vapor Pressure Physical State/Color Water Reactivity	: C14H32N2O2Cu : 323.96g/mol : 60¡É/0.1torr : 98¡É/2.5torr : Liquid (Dark purple) : React slowly
MABONi		Molecular Formula Molecular Weight Boiling Point Vapor Pressure Physical State/Color Water Reactivity	: C14H32N2O2Ni : 319.19g/mol : 148¡É/3.32torr : 80¡É/0.1torr : Liquid (Dark Green) : React slowly
Ni(EtCp)2		Molecular Formula Molecular Weight Boiling Point Vapor Pressure Physical State/Color Water Reactivity	: C14H18Ni : 244.99g/mol : 75¡É/0.05torr : N/A : Liquid (Green) : React slowly
CpCo(CO)2		Molecular Formula Molecular Weight Melting Point Boiling Point Vapor Pressure Physical State/Color Water Reactivity	: C7H5CoO2 : 180.11g/mol : -22¡É : 177¡É : 25¡É/0.92torr : Liquid(Orange) : React slowly