Home > 제품정보 > 반도체재료 > High-k for Capacitor

High-k for Capacitor

소자의 미세화에 따라 Capacitor 부피가 적어지고 그에 따른 정전용량 감소를 극복하기 위한 방법으로 High-k 물질을 사용하게 되었습니다. High-k Materials로는 현재 ZrO2 및 HfO2가 많이 사용되고 있습니다.
※ k : 유전상수 (값이 클수록 가질 수 있는 전기용량이 큼)

High-k for Capacitor

Product Structure Property MSDS
TEMAHf Molecular Formula
Molecular Weight
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity		 : C12H32N4Hf
: 411.89g/mol
: 25℃/0.1torr
: -
: Yellow Liquid
: Violently react
TEMAZr Molecular Formula
Molecular Weight
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity 		: C12H32N4Zr
: 323.62g/mol
: 81℃/0.1torr
: -
: Liquid(Colorless to pale Yellow)
: Violently react
A2HP7 Molecular Formula
Molecular Weight
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity 		: C11H23N3Zr
: 288.5g/mol
: 264℃
: 90℃/0.3torr
: Yellow Liquid
: Slowly react
TMA Molecular Formula
Molecular Weight
Melting Point
Vapor Pressure
Physical State/Color
Water Reactivity		 : C3H9Al
: 72.09g/mol
: 15°C
: 125°C
: 60℃/69.3torr
: Liquid (Colorless)
: React Violently
TBTDEN Molecular Formula
Molecular Weight
Boiling Point
Physical State/Color
Water Reactivity 		: C16H39N4Nb
: 394.446g/mol
: 94℃/0.1torr
: Pale Yellow Liquid
: Slowly react
Cp(Me)CpZr(OEt)2 Molecular Formula
Molecular Weight
Boiling Point
Physical State/Color
Water Reactivity 		: C15H22O2Zr
: 325.56g/mol
: 87℃/0.326torr
: Yellow Liquid
: Slowly react