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Metallization Metal

반도체 소자의 미세화에 따라 Metal의 증착방법이 PVD(Physical Vapor Deposition)에서 CVD (Chemical Vapor Deposition) 및 ALD(Atomic Layer Deposition)방법으로 전환되면서 재료 또한 변화가 요구되었습니다. Alpis-3와 MABOC은 그러한 변화요구에 따라 디엔에프가 개발한 CVD/ALD용 전구체입니다.

※ Metallization Metal Materials의 변화 : W(Resistivity 8.0 μΩ-cm) → Al(2.7 μΩ-cm) → Cu(1.7 μΩ-cm)
※ Metal Deposition 방식의 변화 : PVD → CVD → ALD

Metallization Metal

Product Structure Property MSDS
Alpis-3 Molecular Formula
Molecular Weight
Melting Point
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity		 : C3H15AlBN
: 102.95g/mol
: 19℃
: 195°C
: 40℃/1torr
: Liquid (Colorless)
: React Violently
DMEAA Molecular Formula
Molecular Weight
Melting Point
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity 		: C4H14AlN
: 103.14g/mol
: 5℃
: 50°C/0.05torr
: 24℃/1.98torr
: Liquid (Colorless)
: React Violently
DMAH Molecular Formula
Molecular Weight
Melting Point
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity 		: C2H7Al
: 58.06g/mol
: 15℃
: 154℃
: 25℃/1.9torr
: Liquid (Colorless)
: React Violently
CCTBA Molecular Formula
Molecular Weight
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity 		: C12H10O6Co2
: 368.07g/mol
: 52℃/0.8torr
: 40℃/0.1torr
: Liquid (Reddish brown)
: No Reaction
BTBBDMT Molecular Formula
Molecular Weight
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity 		: C2H30N4W
: 414.23g/mol
: 60℃/0.05torr
: 40℃/0.1torr
: Liquid (Pale yellow)
: React slowly
TMA Molecular Formula
Molecular Weight
Melting Point
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity		 : C3H9Al
: 72.09g/mol
: 15°C
: 125°C
: 60℃/69.3torr
: Liquid (Colorless)
: React Violently
MABOC Molecular Formula
Molecular Weight
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity		 : C14H32N2O2Cu
: 323.96g/mol
: 60℃/0.1torr
: 98℃/2.5torr
: Liquid (Dark purple)
: React slowly
MABONi Molecular Formula
Molecular Weight
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity 		: C14H32N2O2Ni
: 319.19g/mol
: 148℃/3.32torr
: 80℃/0.1torr
: Liquid (Dark Green)
: React slowly
Ni(EtCp)2 Molecular Formula
Molecular Weight
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity 		: C14H18Ni
: 244.99g/mol
: 75℃/0.05torr
: N/A
: Liquid (Green)
: React slowly
CpCo(CO)2 Molecular Formula
Molecular Weight
Melting Point
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity 		: C7H5CoO2
: 180.11g/mol
: -22℃
: 177℃
: 25℃/0.92torr
: Liquid(Orange)
: React slowly